双光源干涉法测量液态薄膜厚度
  
  					 
  					  										
						
	刘维慧 1  ,梁润泽 2  ,赵泉昕 1  ,卓朝博 1  ,苗永平 1* 
 
					 
															
					
	1.山东科技大学 电子信息工程学院,山东 青岛 266510;2.山东大学 晶体材料国家重点实验室新一代半导体材料研究院,山东 济南 250100
  
					 
										
						 
					 
   										
    					
	Research on the Technology of Liquid Film Thickness Measurement Based on Optical Interferometry
  
  					 
  					  					  					
						
	LIU Weihui 1  ,LIANG Runze 2  ,ZHAO Quanxin 1  ,ZHUO Chaobo 1  ,MIAO Yongping 1* 
 
					 
														
				
				
					
						
							
								
									
										
								            
                        					 
												
													
													    
													    	
									 
								 
								
													
													
													    
													    		                            						                            																	    摘要  
	以迈克尔逊干涉仪为核心设备搭建实验系统,提出双光源光学干涉条纹的调试方案,引入基于 Python 的图像处理技术,分析基准图样与调节图样的重合度判断调节边界,实现薄膜厚度的精确测量。以肥皂膜为样品进行了实验,结果表明该实验方案具有良好的可操作性和可重复性,较目视估算法提升了测量精度,为无损测量液态薄膜厚度提供了解决方案,也可引入大学物理实验课程,提升学生研究创新能力。
 
																										     
													    
													    	
															 
														 
												  		 
												         
												        														
															关键词:  
																																																																
	光学干涉法  
																																																																	液态薄膜  
																																																																	迈克尔逊干涉仪  
																																																																	图像处理
  
																																  
															 
														 
																																										
															Abstract:  
	The experimental system is built with the Michelson interferometer as the core equipment,and the debugging scheme of double light source optical interference fringes is proposed. The image processing technology based on Python is introduced to analyze the coincidence degree between the reference pattern and the adjustment pattern to judge the adjustment boundary,which realizes the accurate measurement of film thickness. Experiments were conducted using soap film as a sample,and the results showed that the experimental scheme had good operability and repeatability,improved measurement accuracy compared to visual estimation algorithms,and provided a solution for non-destructive measurement of liquid film thickness.It can also be introduced into university physics experiments to enhance students’research and innovation
	abilities.
 
														 
																																										
															Key words:  
																																																	
	optical interferometry 
																	  																																		liquid thin film 
																	  																																		Michelson interferometer 
																	  																																		image processing
 
																																																 
														 
																												
														
															
															        
																    
																    
																																	出版日期:   2024-02-25
															        
																																	发布日期:   2024-02-25
															    															        
															    																	整期出版日期:   2024-02-25
															    															 
														 
														 														
															
																
															 
														 
																																									    																												
																													
													
													
														
															引用本文:      
														 
														
															
																														刘维慧 , 梁润泽 , 赵泉昕 , 卓朝博 , 苗永平 . 
	双光源干涉法测量液态薄膜厚度
[J]. 大学物理实验, 2024, 37(1): 31-36.	
																																									     												                                                                                                        	                                                             LIU Weihui, LIANG Runze , ZHAO Quanxin , ZHUO Chaobo , MIAO Yongping. 
	Research on the Technology of Liquid Film Thickness Measurement Based on Optical Interferometry
. Physical Experiment of College, 2024, 37(1): 31-36.	
                                                        															 
														 
														 
														
															 
														 
														 
														
															链接本文:    
														 
														
															
																
																	
																	http://dawushiyan.jlict.edu.cn/CN/10.14139/j.cnki.cn22-1228.2024.01.007
																	 
																 或          
																
																http://dawushiyan.jlict.edu.cn/CN/Y2024/V37/I1/31 															 
														 
													
												 
												
																																	            												
											
														
															
																
																	
																																																																																																																																																															
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