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| Design and Practice of A Physics Teaching Experiment basedon the Thermal Stability Study of GZO Thin Films:From Material Preparation to System Optimization for Interdisciplinary Ahility Cultivation |
| LI Penga,b,LI Haiyanga,BAI Suren
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1.School of Physics,Norheast Normal Univesity,Changehun 130024,Jilin Province, China;2.National Demomatrution Cemter for
Experimental Physics Education (Northeast Normal University),Changehuan 130024,Jilin Proince,China)
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Abstract This experiment takes gallium-doped zine oxide (GZ0) thin films as the research objeet. Bycombining pulsed laser deposition (PL,D) technology with gradient annealing processes,it svstematicallvinvestigates the regulation mechanisms of air annealing at 30)-700IC on the struectural,electrical,and opticalproperties of the films, constructing an inquiry-based leaching model focuased on the " process-structure-property" correlation,Experimental results show that 600 C annealing optimizes grain size (26.2 nm) andcrystallinity (002) peak full width at half maximum (F'WHM) of O.34o],achieving synergistic enhancementof carrier concentration (7.13x 10l'" cm-?) and mobility (65.3 cm2/V.s),with resistivity as low as 1.34x 10-3I . cm and visible light transmittance excceding 90%o,In contrast,700 C annealing induces surface cracks andproliferation of zine vacaney (VZn) defects due to lattice mismatch,leading to degradation of electricalperformance and revealing the theral stability threshold of GZ0 thin films. Through combined analysis ofmulti-scale characterization (SEM, XRD, PL) and physical equations Hall effect, Burstein-Moss effect).students can establish a svstematic cognitive framework of " microscopic defects-transport parameters-macroscopic properties,"mastering methods for correlating material preparation process optimization withperformance failure mechanisms,Integrating materials engineering and semiconductor physics knowledge,thisexperiment adopts a "problem-oriented,data-driven,mode]-building" teaching approach to culivate students'intendisciplinary esperimental desigm capabilities,critical thinking,and engineering decision-making literacy.providing an imnovative paradigm for the researeh and teaching practice of new transparent conductivematerials.
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Published: 25 December 2025
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