The physics plays an extremely important role in the natural science, and the history of physics also plays an important role in the teaching process of university physics. In this paper, the education function of the history of physics is introduced and analyzed in cultivating students' scientific quality, innovative quality and humanistic quality. According to the education function of the history of physics, the principles and methods of reference for the history of physics are analyzed in university physics teaching. At the same time, combining with the current teaching process of university physics, this paper makes a questionnaire survey and analysis of students' attitudes towards the history of physics, which has certain reference value and significance for university physics teaching.