石英基底上可见光区减反射涂层的双层膜系设计

doi:10.14139/j.cnki.cn22-1228.2023.02.006

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摘要

针对石英光学基底合理设计多层膜系是提高光学器件透射率的关键方法。设计了两种不同的膜系结构，运用导纳轨迹法分析这两种膜系的设计原理。利用光学薄膜设计软件 Filmstr分别得到两种膜系的最优解，以使在可见光区膜系的平均透射率尽可能接近于 100％。

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	魏　栋
	靳志勇
	贾红宝
	朱世海

关键词: Filmstr 减反射膜膜系设计导纳轨迹法溶胶-凝胶法

Abstract:

Reasonable design of multilayer film system for quartz optical substrate is the key method to improvethe transmittance of optical devices. We designed two different film structures and analyzed the designprinciples of these two systems via admittance loci method.The optical thin film design software Filmstar is usedto obtain the optimal solution of the two film systems respectively ,so that the average transmittance of the filmsystem in the visible region is as close as possible to 100%.

Key words: Filmstar anti-reflective coating thin-film design admittance loci sol-gel

出版日期: 2023-04-25 发布日期: 2023-04-25 整期出版日期: 2023-04-25

ZTFLH:

O 4-33

引用本文:

魏　栋, 靳志勇, 贾红宝 , 朱世海. 石英基底上可见光区减反射涂层的双层膜系设计 [J]. 大学物理实验, 2023, 36(2): 26-30.
WEI Dong, JIN Zhiyong, JIA Hongbao, ZHU Shihai. Double-Layer Film System Design of Antireflective CoatingCovering the Visible Region on Ouartz Substrate . Physical Experiment of College, 2023, 36(2): 26-30.

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http://dawushiyan.jlict.edu.cn/CN/10.14139/j.cnki.cn22-1228.2023.02.006 或 http://dawushiyan.jlict.edu.cn/CN/Y2023/V36/I2/26

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