ZnO·TiO2 双层复合薄膜的制备及其光学性能的研究

doi:10.14139/j.cnki.cn22-1228.2022.01.006

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摘要

采用溶胶-凝胶法( Sol-Gel) ，分别以乙酸锌( Zn( CH3COO) 2H2O) 、钛酸酊酯( Ti( OC4H9 ) 4 )为锌源和钛源，在玻璃衬底以及硅衬底上制备了不同浓度的、均匀的、结晶质量良好的单层 ZnO、TiO2 薄膜及双层的 ZnO·TiO2 复合薄膜。结果表明，所制备的单层本征 ZnO、TiO2 薄膜分别沿( 002) 、( 101) 晶面生长，且当本征 ZnO、TiO2 的浓度分别为 0．45 mol /L、0．65 mol /L 时，择优取向生长最明显。ZnO·TiO2复合薄膜的( 101) 、( 004) 特征峰明显，且 0．45 mol /L/0．55 mol /L 的双层 ZnO·TiO2 复合薄膜结晶质量最好; 薄膜表面最为平整，粒子分布均匀，粘连现象最少; 对紫外光的吸收最强，禁带宽度为 3．39 eV。

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	蔺冬雪
	赵莉
	王媛媛
	王玉新

关键词: ZnO 薄膜 TiO2 薄膜溶胶-凝胶法双层复合薄膜光学性能

Abstract:

The sol-gel method ( Sol-Gel) was used to prepare single crystal ZnO，TiO2 thin films and bilayer ZnO·TiO2 composite films on glass substrates and silicon substrates respectively，using zinc acetate ( Zn ( CH3COO) 2H2O) and tincture of titanium tincture ( Ti( OC4H9 ) 4 ) as zinc source and titanium source．The results showed that the monolayer intrinsic ZnO and TiO2 films grew along ( 02) and ( 101) crystal planes respectively，and the preferred orientation growth was the most obvious when the concentrations of intrinsic ZnO and TiO2 were 0．45 mol /L and 0．65 mol /L respectively．The ( 101) and ( 04) characteristic peaks of ZnO· TiO2 composite films were obvious，and the crystallization quality of double-layer ZnO·TiO2 composite films was the best when 0． 45 mol /L /0． 55 mol /L． The film surface was the flattest，the particles were evenly distributed and the adhesion was the least．The absorption of ultraviolet light was the strongest，and the band gap is 3．39 eV．

Key words: ZnO thin film TiO2 thin film sol-gel method double layer composite film optical performance

出版日期: 2022-02-25 发布日期: 2022-02-25 整期出版日期: 2022-02-25

ZTFLH:

O 484．1

引用本文:

蔺冬雪, 赵莉, 王媛媛, 王玉新 . ZnO·TiO2 双层复合薄膜的制备及其光学性能的研究 [J]. 大学物理实验, 2022, 35(1): 25-29.
LIN Dongxue, ZHAO Li, WANG Yuanyuan, WANG Yuxin. Preparation and Optical Properties of ZnO·TiO2 Bilayer Composite Films . Physical Experiment of College, 2022, 35(1): 25-29.

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http://dawushiyan.jlict.edu.cn/CN/10.14139/j.cnki.cn22-1228.2022.01.006 或 http://dawushiyan.jlict.edu.cn/CN/Y2022/V35/I1/25