原子层沉积方法制备高性能 Al2O3 介电材料教学设计

doi:10.14139/i.cnki.cn22-228.2024.05.016

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摘要

随着微电子技术向纳米尺度迈进，高性能介电材料的开发成为提升集成电路性能的关键。原子层沉积(Atomic Layer Deposition，ALD)技术以其卓越的薄膜均匀性、精确的厚度控制和良好的界面特性，在制备高性能 Al₂O₃ 介电材料方面展现出巨大潜力。本文针对微电子科学与工程和集成电路等相关专业，设计了 ALD 方法制备高性能 Al₂O₃ 介电材料的教学内容，通过介绍 ALD 沉积技术原理、Al₂O₃ 介电薄膜相关知识、实验操作流程，Al₂O₃ 介电薄膜的表征与分析等过程设计，旨在培养和提高学生的实践能力和创新能力。

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	王雷妮
	杨波
	胡杨
	胡鹏飞
	鲁世斌
	王菲菲
	周睿阳
	邱晨
	尤新雨
	刘一博
	陶夕宇

关键词: 原子层沉积介电 Al₂O₃ 教学研究

Abstract:

With the advaneement of mieroelectronies technology towards the nanoscale, the development ofhigh-perforance dielectric materials has become the key to improving the performance of integrated circuits Atomic Layer Deposition (ALI) technology shows great potential in the preparation of high-performance Al₂O₃lielectric materials due to its exeellent film uniformity , precise thickness control, and good interface properties. It focuses on the experimental teaching content of ALD method for preparing Al₂O₃ high-performance dielectricmaterials is designed for related majors such as microelectronies science and engineering and integrated circuits. By introducing the principles of ALD deposition technology, knowledge related to Al₂O₃ dielectricfilms, experimental operation procedures, characterization and analysis of Al₂O₃ dieleetrie films and otherprocess designs.lt aims to cultivate and improve students’ practical and innovative abilities.

Key words: atomic layer deposition dielectric Al₂O₃ teaching research

发布日期: 2024-10-25

ZTFLH:

G 642|O 472

引用本文:

王雷妮 , 杨波 , 胡杨 , 胡鹏飞 , 鲁世斌 , 王菲菲 , 周睿阳 , 邱晨 , 尤新雨 , 刘一博 , 陶夕宇 . 原子层沉积方法制备高性能 Al₂O₃ 介电材料教学设计 [J]. 大学物理实验, 2024, 37(5): 83-87.
WANG Leini , YANG Bo, HU Yang, HU Pengfei, LU Shibin, WANG Feifei, ZHOU Ruiyang , QlU Chen, YOU Xinyu, LIU Yibo , TAO Xiyu. Teaching Design for Preparation of High Performance Al₂O₃Dielectric Materials by Atomic Layer Deposition Method . Physical Experiment of College, 2024, 37(5): 83-87.

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http://dawushiyan.jlict.edu.cn/CN/10.14139/i.cnki.cn22-228.2024.05.016 或 http://dawushiyan.jlict.edu.cn/CN/Y2024/V37/I5/83

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[1]	. [J]. Physical Experiment of College, 2020, 33(1): 0 .
[2]	. [J]. Physical Experiment of College, 2020, 33(1): 0 .
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