双层介孔SiO2减反膜的制备及光学性能分析

doi:10.14139/j.cnki.en22-228.2025.02.007

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摘要

以三嵌段共聚物 F127 和阳离子聚合物纳米乳液 CPN 为模板剂，以正硅酸四乙酯为前驱物，在酸催化的醇体系中制备 SiO2 溶胶。利用 Filmstar 薄膜设计软件构建膜系结构，采用提拉法在石英基底上制备出厚度精确可控的双层宽谱带减反射介孔 SiO2 膜。采用原子力显微镜、扫描电镜、透射电镜、N2吸附-脱附分析仪、紫外-可见-近红外分光光度计等对薄膜形貌、结构和光学性能进行表征分析。结果表明，双层介孔 SiO 2 减反膜在300～800nm范围内平均透过率实际可高达98.9%。

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	张子潮
	肖志葳
	贾红宝
	王颖
	朱世海

关键词: 溶胶-凝胶介孔SiO2薄膜宽谱带减反射膜

Abstract:

Using tribloek copolymer F127 and eationie polymerie nanolatex(CPN) as templates, and tetraethylorthosilieate ( TE0S)as the precursor, Si0, solswereprepared in an acid-catalyzed aleohol system, The filmsystem structure was built using Filmstar thin film design software, and a double-ayer broadband antireflectivemesoporous Si0, film with preeisely controllable thickness was prepared on a quartz substrate using the dip-coating method.The morphology, structure , and optical properties of the film were characterized and analyzedusing atomie foree microseopy ( AFM) , seanning eleetron mieroscopy ( SEM ) , transmission eleetron mieroscopy( TEM ) , N, adsorption-desorption analyzer, and [V-visible-near-infrared speetrophotometer.The results showthat the average transmitance of the double dayer mesoporous $i0, antirellective film can reach up to 98,996 inthe 300~800 nm range.

Key words: sol-gel mesoporous SiO2 thin film broadband antirelleetive film

出版日期: 2025-04-25 发布日期: 2025-04-25 整期出版日期: 2025-04-25

ZTFLH:

O 484.5

基金资助:

辽宁省教育厅基本科研项目-面上项目(LJKMZ20220641;JYTMS20230949);“辽宁科技大学高能光电交叉学科团队”基金

引用本文:

张子潮, 肖志葳, 贾红宝 , 王颖, 朱世海. 双层介孔SiO2减反膜的制备及光学性能分析 [J]. 大学物理实验, 2025, 38(2): 37-41.
ZHANG Zichao, XlA Zhiwei, JlA Hongbao , WANG Ying, ZHU Shihai. Preparation and Optical Properties Analysis of Double-layerMesoporous SiO2,Antirefleetion Coating . Physical Experiment of College, 2025, 38(2): 37-41.

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https://dawushiyan.jlict.edu.cn/CN/10.14139/j.cnki.en22-228.2025.02.007 或 https://dawushiyan.jlict.edu.cn/CN/Y2025/V38/I2/37