泊松亮斑的模拟仿真研究

doi:10.14139/j.cnki.cn22-1228.2020.01.020

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摘要

泊松亮斑是证明光波动性的一个重要实验现象。我们根据菲涅尔衍射理论，利用计算机Matlab程序编程，对泊松亮斑形成的衍射过程进行了模拟仿真。通过改变入射光的波长、圆盘的直径、圆盘后成像位置，来研究泊松亮斑及其衍射环的变化规律。研究表明，采用合适的入射波长、圆盘和成像位置，可以实现单暗环或多暗环的光场分布，在半导体微纳加工方面具有一定的应用价值。

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	赵靓

关键词: 泊松亮斑菲涅尔衍射 Matlab 光刻

Abstract:

Poisson bright spot is an important experimental phenomenon which be used for proving the fluctuation of light. Based on the Fresnel diffraction theory, the diffraction processes of Poisson bright spot were simulated by a Matlab program in a computer. The change tendency of the Poisson bright spot and its diffraction rings were studied by different wavelength of incidence light, diameter of the disk, and position of the receiving image. This study shows that single dark ring and multiple dark ring can be realized by suitable conditions, which has potential applications in micro-nano fabrications of semiconductors.

Key words: Poisson bright spot Fresnel diffraction Matlab lithography

出版日期: 2020-02-25 发布日期: 2020-02-25 整期出版日期: 2020-02-25

ZTFLH:

O4-39

引用本文:

赵靓. 泊松亮斑的模拟仿真研究 [J]. 大学物理实验, 2020, 33(1): 82-84.
ZHAO Liang. The Simulated Study of the Poisson Bright Spot . Physical Experiment of College, 2020, 33(1): 82-84.

链接本文:

http://dawushiyan.jlict.edu.cn/CN/10.14139/j.cnki.cn22-1228.2020.01.020 或 http://dawushiyan.jlict.edu.cn/CN/Y2020/V33/I1/82

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